Near-field focusing sensor for characterization of void content in thin dielectric layers
نویسندگان
چکیده
منابع مشابه
A microfabricated sensor for thin dielectric layers.
We describe a sensor for the measurement of thin dielectric layers capable of operation in a variety of environments. The sensor is obtained by microfabricating a capacitor with interleaved aluminum fingers, exposed to the dielectric to be measured. In particular, the device can measure thin layers of solid frozen from a liquid or gaseous medium. Sensitivity to single atomic layers is achievabl...
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We consider the inverse scattering problem of determining the shape and the material properties of a thin dielectric infinite cylinder having an open arc as cross section from knowledge of the TM-polarized scattered electromagnetic field at a fixed frequency. We investigate two reconstruction approaches, namely the linear sampling method and the reciprocity gap functional method, using far fiel...
متن کاملThe Identification of Thin Dielectric Objects from Far Field and near Field Scattering Data
Abstract. We consider the inverse scattering problem of determining the shape and the material properties of a thin dielectric infinite cylinder having an open arc as cross section from a knowledge of the TM-polarized scattered electromagnetic field at a fixed frequency. We investigate two reconstruction approaches, namely the linear sampling method and the reciprocity gap functional method, us...
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ژورنال
عنوان ژورنال: Measurement Science and Technology
سال: 2014
ISSN: 0957-0233,1361-6501
DOI: 10.1088/0957-0233/26/1/015601